HuaweiとSICarrierがEUV不要で5nm製造を可能にするSAQP技術の特許を取得、米国メディア報道

中国
HuaweiとSICarrierがEUV不要で5nm製造を可能にするSAQP技術の特許を取得、米国メディア報道 中Huaweiと中国の半導体製造装置メーカーSiCarrierは、DUV露光装置による自己整合4重パターニング(SAQP)で、EUVリソ並みの微細パターン形成を可能にする特許を2023年後半に取得していたと米国メディアが報じている。
  2024/03/27      news.mynavi.jp/rss/business/technology

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