ADEKA、EUVフォトレジスト向け光酸発生剤の生産能力を倍増 千葉工場に約10億円を投資

営業
ADEKA、EUVフォトレジスト向け光酸発生剤の生産能力を倍増 千葉工場に約10億円を投資 ADEKAは、EUVをはじめとする先端リソグラフィ工程で用いられるフォトレジスト向け光酸発生剤の生産能力を従来比約2倍に引き上げることを決定した。千葉工場の既存建屋内に約10億円を投じて製造ラインを増設し、2028年9月の営業運転開始を予定する。
  2026/08/20      news.mynavi.jp/rss/business/technology
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